Horizontal CVD furnace (Carbon) is applied for composite material
CVD that used hydrocarbon gas (like C3H8) as carbon sources, which
works on CVD and CVI treatment for carbon materials.
1.The furnace working zone size can be reach 2.5m×2.5m×5m, which
can satisfy super size part CVD treatment.
2.Horizontal vacuum carbon furnace adopts multiple temperature
control zones with great temperature uniformity.
3.Special designed deposition chamber achieves good sealing effect
and strong antipollution ability.
4.Multiple deposition channels assures flow field uniformity,
non-deposition dead corner and great deposition surface.
5.Tar, solid powder and organic gases are treated effectively
during the deposition process.
Optional Configuration of Horizontal CVD Furnace
1. Furnace door: manual tight / auto lock-ring tight, Manual
tight/Auto lock-ring tight
2. Furnace vessel: All carbon steel/Inner layer stainless
steel/Total stainless steel
3. Furnace hot zone: Soft carbon felt/Soft graphite felt/Hard
composite felt /CFC
4. Heating element and muffle: Isostatic press graphite/Press high
purity, high strength and high density graphite/ fine size graphite
5. Process gas system: Volume/Mass flow-meter, Manual valve/Auto
valve, Foreign brand/Chinese brand
6. Vacuum pump and gauge: Foreign brand/Chinese brand
7. HMI: Simulation screen/Touch screen/Industrial personal computer
8. PLC: OMRON/Siemens
9. Temperature controller: SHIMADEN/EUROTHERM
10. Thermocouple: C type, S type, K type, N type
11. Recorder: Paperless recorder/paper recorder, Foreign
12. Electric components: CHINT/Schneider/Siemens
13. Load truck: roller type /Fork type/Folded long distance driving
Specifications of Horizontal CVD Furnace
|SpecModel||HCVD -060609-C||HCVD -080812-C||HCVD -101015-C||HCVD -121225-C||HCVD -151530-C|
|Working Zone Size (W × H × L) (mm)||Φ600 × 600 × 900||Φ800 × 800 × 1200||Φ1000 × 1000 × 1500||Φ1200 × 200 × 2500||Φ1500 × 1500 × 3000|
|Max. Temperature (°C)||1500||1500||1500||1500||1500|
|Temperature Uniformity (°C)||±7.5||±7.5||±7.5||±10||±10|
|Ultimate Vacuum (Pa)||50||50||50||50||50|
|Pressure Increase Rate (Pa/h)||0.67||0.67||0.67||0.67||0.67|
|The above parameters can be adjusted to the process requirements,
they are not as acceptance standard, the detail spec. will be
stated in the technical proposal and agreements.|
Founding in 2006, ACME (Advanced Corporation for Materials &
Equipments) is a high-tech enterprise specialized in manufacture of
industry heating equipment for new material and energy. With an area of 100,000 m2 ,our annual production is over 200 sets.
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